HN

Hiromitsu Namba

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #397,733 of 503,207Top 80%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9859136 Substrate processing apparatus and substrate processing method Fitrianto, Yoichi Tokunaga, Yoshifumi Amano 2018-01-02