Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163653 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2018-12-25 |
| 10090191 | Selective plasma etching method of a first region containing a silicon atom and an oxygen atom | Takayuki Katsunuma, Masanobu Honda | 2018-10-02 |
| 9972503 | Etching method | Masanobu Honda | 2018-05-15 |
| 9922806 | Etching method and plasma processing apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2018-03-20 |