Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997374 | Etching method | Ryohei TAKEDA, Sho Tominaga | 2018-06-12 |
| 9922806 | Etching method and plasma processing apparatus | Maju TOMURA, Ryohei TAKEDA, Ryuichi TAKASHIMA | 2018-03-20 |