Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090191 | Selective plasma etching method of a first region containing a silicon atom and an oxygen atom | Maju TOMURA, Takayuki Katsunuma | 2018-10-02 |
| 9972503 | Etching method | Maju TOMURA | 2018-05-15 |
| 9911622 | Method of processing target object | Yoshihide Kihara, Toru Hisamatsu, Tomoyuki Oishi | 2018-03-06 |
| 9887109 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Kazuhiro Kubota | 2018-02-06 |
| 9881806 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Kazuhiro Kubota, Hironobu Ichikawa | 2018-01-30 |