Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090191 | Selective plasma etching method of a first region containing a silicon atom and an oxygen atom | Maju TOMURA, Masanobu Honda | 2018-10-02 |
| 9899232 | Etching method | — | 2018-02-20 |
| 9881806 | Method of manufacturing a semiconductor device | Masanobu Honda, Kazuhiro Kubota, Hironobu Ichikawa | 2018-01-30 |