Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109461 | Plasma processing method | Norikazu Yamada, Toshifumi Tachikawa, Satoru Hamaishi, Koji Itadani | 2018-10-23 |
| 9960016 | Plasma processing method | Kumiko Ono, Hiroshi Tsujimoto | 2018-05-01 |
| 9941098 | Plasma processing method | — | 2018-04-10 |
| 9870898 | Plasma processing method and plasma processing apparatus | Masafumi Urakawa | 2018-01-16 |