Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9870898 | Plasma processing method and plasma processing apparatus | Koichi Nagami | 2018-01-16 |
| 9865471 | Etching method and etching apparatus | Gaku Shimoda, Hotaka Maruyama, Takanori Sato, Masahiro Ogasawara | 2018-01-09 |