Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887276 | Method for manufacturing semiconductor device having oxide semiconductor | Yoshiaki Oikawa, Kenichi OKAZAKI | 2018-02-06 |
| 9865471 | Etching method and etching apparatus | Gaku Shimoda, Takanori Sato, Masafumi Urakawa, Masahiro Ogasawara | 2018-01-09 |