Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960016 | Plasma processing method | Hiroshi Tsujimoto, Koichi Nagami | 2018-05-01 |
| 9904299 | Gas supply control method | Hiroshi Tsujimoto, Atsushi Sawachi, Norihiko Amikura, Norikazu Sasaki, Yoshitaka Kawaguchi | 2018-02-27 |