Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163607 | Temperature control method and plasma processing apparatus | Keigo Toyoda | 2018-12-25 |
| 9960016 | Plasma processing method | Kumiko Ono, Koichi Nagami | 2018-05-01 |
| 9947510 | Method for supplying gas, and plasma processing apparatus | Tomoyuki Mizutani | 2018-04-17 |
| 9904299 | Gas supply control method | Kumiko Ono, Atsushi Sawachi, Norihiko Amikura, Norikazu Sasaki, Yoshitaka Kawaguchi | 2018-02-27 |