Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto +3 more | 2018-09-04 |
| 10037901 | Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium | Kazuya Koyama, Hiromi Kiyose, Katsufumi MATSUKI, Shuhei Takahashi, Hideki Nishimura +1 more | 2018-07-31 |