Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114291 | Grafting agent for forming spacer layer | Ya-Ling Cheng, Ching-Yu Chang, Chien-Chih Chen, Chun-Kuang Chen, Wei-Liang Lin | 2018-10-30 |
| 10036957 | Post development treatment method and material for shrinking critical dimension of photoresist layer | Ching-Yu Chang | 2018-07-31 |