MT

Ming-Sen Tung

TSMC: 1 patents #1,476 of 2,904Top 55%
📍 Baoshan, TW: #127 of 381 inventorsTop 35%
Overall (2018): #298,819 of 503,207Top 60%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10146141 Lithography process and system with enhanced overlay quality Chi-Cheng Hung, Wei-Liang Lin, Yung-Sung Yen, Chun-Kuang Chen, Ru-Gun Liu +6 more 2018-12-04