Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163692 | Structure and formation method of interconnection structure of semiconductor device structure | Chang-Ming Wu | 2018-12-25 |
| 10147829 | Dielectric sidewall structure for quality improvement in Ge and SiGe devices | Chih-Ming Chen, Ming Chyi Liu, Po-Chun Liu | 2018-12-04 |
| 10048220 | Biosensor field effect transistor having specific well structure and method of forming the same | Shih-Wei Lin, Chang-Ming Wu, Shih-Chang Liu | 2018-08-14 |
| 10037893 | Method and apparatus for etching wafer with etching gas | Chang-Ming Wu | 2018-07-31 |
| 10029910 | Formation method of MEMS device structure with cavities | Chang-Ming Wu | 2018-07-24 |
| 9975757 | Wafer Level Hermetic Seal Process for microelectromechanical systems (MEMS) devices | Chung-Yen Chou, Shih-Chang Liu, Yuan-Chih Hsieh | 2018-05-22 |
| 9944516 | High aspect ratio etch without upper widening | Chung-Yen Chou, Chia-Shiung Tsai, Ru-Liang Lee | 2018-04-17 |
| 9878899 | Method and apparatus for reducing in-process and in-use stiction for MEMS devices | Chang-Ming Wu, Shih-Chang Liu, Yuan-Chih Hsieh | 2018-01-30 |