Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982340 | Shower head apparatus and method for controlling plasma or gas distribution | Chih-Tsung Lee, Hung Jui Chang, You-Hua Chou, Shiu-Ko JangJian, Chung-En Kao +1 more | 2018-05-29 |