Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163887 | Method and structure for semiconductor mid-end-of-line (MEOL) process | Chih Wei Lu, Chung-Ju Lee, Hsiang-Ku Shen, Zhao-Cheng Chen | 2018-12-25 |
| 10068770 | Method and structure for semiconductor device having gate spacer protection layer | Chih Wei Lu, Chung-Ju Lee, Hai-Ching Chen, Tien-I Bao | 2018-09-04 |
| 10032640 | Formation of semiconductor structure with a photoresist cross link and de-cross link process | Chung-Ju Lee, Ming-Hui Weng, Tzu-Hui Wei | 2018-07-24 |
| 10002820 | Through silicon via layout pattern | Sun-Rong Jan, Che-Yu Yeh, Chee-Wee Liu, Bing J. Sheu | 2018-06-19 |
| 9947646 | Method and structure for semiconductor mid-end-of-line (MEOL) process | Chih Wei Lu, Chung-Ju Lee, Hsiang-Ku Shen, Zhao-Cheng Chen | 2018-04-17 |
| 9934987 | Chemical circulation system and methods of cleaning chemicals | Chung-Ju Lee | 2018-04-03 |