Issued Patents 2018
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156788 | Resist underlayer film composition, patterning process, and compound | Jun Hatakeyama, Daisuke KORI | 2018-12-18 |
| 10131603 | Method for reducing metal of sugar-alcohol compound and sugar-alcohol compound | Takayoshi NAKAHARA, Takeru Watanabe, Seiichiro Tachibana | 2018-11-20 |
| 10109485 | Silicon-containing condensate, composition for forming a silicon-containing resist under layer film, and patterning process | Keisuke NIIDA, Yasuyuki Yamamoto | 2018-10-23 |
| 10047244 | Method for producing a composition for forming an organic film | Daisuke KORI, Motoaki Iwabuchi | 2018-08-14 |
| 10007183 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Takeru Watanabe, Kazumi Noda, Toshiharu Yano | 2018-06-26 |
| 9984891 | Method for forming organic film and method for manufacturing substrate for semiconductor apparatus | Rie Kikuchi | 2018-05-29 |
| 9977330 | Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process | Seiichiro Tachibana, Daisuke KORI, Takeru Watanabe, Kazumi Noda, Toshiharu Yano | 2018-05-22 |
| 9971245 | Silicon-containing polymer, silicon-containing compound, composition for forming a resist under layer film, and patterning process | Takeru Watanabe, Kazunori Maeda | 2018-05-15 |
| 9902875 | Composition for forming a coating type BPSG film, substrate, and patterning process | Seiichiro Tachibana, Yoshinori Taneda, Rie Kikuchi | 2018-02-27 |
| 9880470 | Composition for forming a coating type silicon-containing film, substrate, and patterning process | Seiichiro Tachibana, Yoshinori Taneda, Rie Kikuchi | 2018-01-30 |
| 9857686 | Composition for forming resist underlayer film and patterning process | Daisuke KORI, Jun Hatakeyama, Naoki Kobayashi | 2018-01-02 |