Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9984891 | Method for forming organic film and method for manufacturing substrate for semiconductor apparatus | Tsutomu Ogihara | 2018-05-29 |
| 9902875 | Composition for forming a coating type BPSG film, substrate, and patterning process | Seiichiro Tachibana, Yoshinori Taneda, Tsutomu Ogihara | 2018-02-27 |
| 9880470 | Composition for forming a coating type silicon-containing film, substrate, and patterning process | Seiichiro Tachibana, Yoshinori Taneda, Tsutomu Ogihara | 2018-01-30 |