Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9902875 | Composition for forming a coating type BPSG film, substrate, and patterning process | Seiichiro Tachibana, Rie Kikuchi, Tsutomu Ogihara | 2018-02-27 |
| 9880470 | Composition for forming a coating type silicon-containing film, substrate, and patterning process | Seiichiro Tachibana, Rie Kikuchi, Tsutomu Ogihara | 2018-01-30 |