Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109485 | Silicon-containing condensate, composition for forming a silicon-containing resist under layer film, and patterning process | Tsutomu Ogihara, Keisuke NIIDA | 2018-10-23 |
| 10005166 | Tool changer | — | 2018-06-26 |