Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151025 | Helmholtz coil assisted PECVD carbon source | Christopher L. Platt, Zhaohui Fan, Chun Wai Joseph Tong, Thomas Larson Greenberg, Xiaoding Ma | 2018-12-11 |
| 10109465 | Coil filament for plasma enhanced chemical vapor deposition source | Romulo Ata, Zhaohui Fan, Christopher L. Platt, Xiaoding Ma | 2018-10-23 |
| 9991099 | Filament holder for hot cathode PECVD source | Christopher L. Platt, Thomas Larson Greenberg | 2018-06-05 |