Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109465 | Coil filament for plasma enhanced chemical vapor deposition source | Zhaohui Fan, Samuel Lewis Tanaka, Christopher L. Platt, Xiaoding Ma | 2018-10-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109465 | Coil filament for plasma enhanced chemical vapor deposition source | Zhaohui Fan, Samuel Lewis Tanaka, Christopher L. Platt, Xiaoding Ma | 2018-10-23 |