Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151025 | Helmholtz coil assisted PECVD carbon source | Zhaohui Fan, Samuel Lewis Tanaka, Chun Wai Joseph Tong, Thomas Larson Greenberg, Xiaoding Ma | 2018-12-11 |
| 10109465 | Coil filament for plasma enhanced chemical vapor deposition source | Romulo Ata, Zhaohui Fan, Samuel Lewis Tanaka, Xiaoding Ma | 2018-10-23 |
| 9991099 | Filament holder for hot cathode PECVD source | Samuel Lewis Tanaka, Thomas Larson Greenberg | 2018-06-05 |