Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151025 | Helmholtz coil assisted PECVD carbon source | Christopher L. Platt, Zhaohui Fan, Samuel Lewis Tanaka, Thomas Larson Greenberg, Xiaoding Ma | 2018-12-11 |
| 9865440 | Sputtering shield | Stan Kassela, Wei Xu, Lim Boon Leong, Liu Hao Jun, Weilu Xu +3 more | 2018-01-09 |