Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153181 | Substrate treating apparatus and substrate treating method | Yosuke HANAWA, Soichi Nadahara, Dai Ueda, Hiroaki Kitagawa, Katsuya Okumura | 2018-12-11 |
| 9859110 | Substrate cleaning method and substrate cleaning apparatus | Yosuke HANAWA, Katsuhiko Miya | 2018-01-02 |