Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153181 | Substrate treating apparatus and substrate treating method | Yuta SASAKI, Soichi Nadahara, Dai Ueda, Hiroaki Kitagawa, Katsuya Okumura | 2018-12-11 |
| 9976804 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Katsuhiko Miya | 2018-05-22 |
| 9859110 | Substrate cleaning method and substrate cleaning apparatus | Katsuhiko Miya, Yuta SASAKI | 2018-01-02 |