Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153181 | Substrate treating apparatus and substrate treating method | Yuta SASAKI, Yosuke HANAWA, Soichi Nadahara, Dai Ueda, Hiroaki Kitagawa | 2018-12-11 |
| 10109501 | Manufacturing method of semiconductor device having a voltage resistant structure | Koh Yoshikawa, Haruo Nakazawa, Kenichi Iguchi, Yasukazu Seki | 2018-10-23 |
| 9884350 | Reticle chuck cleaner | Masamitsu Itoh, Taro Inada, Jun Watanabe | 2018-02-06 |