Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10065218 | Substrate processing method and substrate processing apparatus | Hiroaki Kitagawa | 2018-09-04 |
| 9976804 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Yosuke HANAWA | 2018-05-22 |
| 9922848 | Apparatus for and method of processing substrate | Hiroaki Kitagawa | 2018-03-20 |
| 9859110 | Substrate cleaning method and substrate cleaning apparatus | Yosuke HANAWA, Yuta SASAKI | 2018-01-02 |