Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9875534 | Techniques and systems for model-based critical dimension measurements | Eric Vella, Balaji Ganapathy, Yanwei Liu | 2018-01-23 |
| 9863761 | Critical dimension uniformity monitoring for extreme ultraviolet reticles | Rui-fang Shi, Alex Pokrovskiy, Weston L. Sousa | 2018-01-09 |