Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074036 | Critical dimension uniformity enhancement techniques and apparatus | Hawren Fang | 2018-09-11 |
| 9875534 | Techniques and systems for model-based critical dimension measurements | Abdurrahman Sezginer, Eric Vella, Balaji Ganapathy | 2018-01-23 |