Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10140698 | Polygon-based geometry classification for semiconductor mask inspection | Yin Xu, Wenfei Gu | 2018-11-27 |
| 9863761 | Critical dimension uniformity monitoring for extreme ultraviolet reticles | Alex Pokrovskiy, Abdurrahman Sezginer, Weston L. Sousa | 2018-01-09 |