Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9912258 | Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same | Haejoong Park, Hongmyoung Kim, Sangkyu PARK | 2018-03-06 |
| 9870900 | Methods and systems for managing semiconductor manufacturing equipment | Ohyung Kwon, Junghyun Cho, Haejoong Park | 2018-01-16 |
| 9859175 | Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same | Kiwook Song, Bum-Soo Kim, Masayuki Tomoyasu, Eunwoo Lee, Jong-Seo Hong | 2018-01-02 |