Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9912258 | Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same | Hongmyoung Kim, Kye Hyun Baek, Sangkyu PARK | 2018-03-06 |
| 9870900 | Methods and systems for managing semiconductor manufacturing equipment | Kye Hyun Baek, Ohyung Kwon, Junghyun Cho | 2018-01-16 |