Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9912258 | Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same | Haejoong Park, Kye Hyun Baek, Sangkyu PARK | 2018-03-06 |