Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9859175 | Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same | Bum-Soo Kim, Kye Hyun Baek, Masayuki Tomoyasu, Eunwoo Lee, Jong-Seo Hong | 2018-01-02 |