Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9868131 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Juhana Kostamo, Sven Lindfors | 2018-01-16 |
| 9869020 | Protecting a target pump interior with an ALD coating | Harri Vähämäki | 2018-01-16 |