Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161038 | Substrate loading in an ALD reactor | Vaino Kilpi, Juhana Kostamo | 2018-12-25 |
| 9989725 | Optical imaging lens with a fixing structure | Wei Fu, Zhen Chen, Hai Zhan, Hung-Chang Cho | 2018-06-05 |
| 9904398 | Pressure detection unit, pressure detection method and display panel | Shengji Yang, Xue Dong, Hailin Xue, Xiaochuan Chen, Haisheng Wang +5 more | 2018-02-27 |
| 9868131 | Atomic layer deposition with plasma source | Vaino Kilpi, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2018-01-16 |