Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041169 | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor | — | 2018-08-07 |
| 10011904 | Atomic layer deposition apparatus and loading methods | Juha A. Kustaa-Adolf Poutiainen | 2018-07-03 |
| 9868131 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2018-01-16 |