Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161038 | Substrate loading in an ALD reactor | Vaino Kilpi, Wei Li | 2018-12-25 |
| 9868131 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Sven Lindfors | 2018-01-16 |