Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109454 | Diagnosis method, charged particle beam lithography apparatus, and recording medium | Kei Hasegawa | 2018-10-23 |
| 9953800 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Kei Hasegawa, Hideo Inoue, Yoshiaki Onimaru | 2018-04-24 |
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa, Hideo Inoue, Yasuo Kato, Jun Yashima | 2018-04-03 |