Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa, Hideo Inoue, Hayato Kimura, Yasuo Kato | 2018-04-03 |
| 9875876 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2018-01-23 |