Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953800 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Kei Hasegawa, Hayato Kimura, Hideo Inoue | 2018-04-24 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953800 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Kei Hasegawa, Hayato Kimura, Hideo Inoue | 2018-04-24 |