Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109454 | Diagnosis method, charged particle beam lithography apparatus, and recording medium | Hayato Kimura | 2018-10-23 |
| 9953800 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Hayato Kimura, Hideo Inoue, Yoshiaki Onimaru | 2018-04-24 |