Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128102 | Methods and apparatus for wetting pretreatment for through resist metal plating | Bryan L. Buckalew, Thomas A. Ponnuswamy, Brian Paul Blackman, Chad Michael Hosack, Steven T. Mayer | 2018-11-13 |
| 10106907 | Protecting anodes from passivation in alloy plating systems | Steven T. Mayer, David W. Porter, Thomas A. Ponnuswamy | 2018-10-23 |
| 10092933 | Methods and apparatuses for cleaning electroplating substrate holders | Santosh Kumar, Bryan L. Buckalew, Steven T. Mayer, Thomas A. Ponnuswamy, Chad Michael Hosack +2 more | 2018-10-09 |
| 10094034 | Edge flow element for electroplating apparatus | Gabriel Hay Graham, Bryan L. Buckalew, Steven T. Mayer, Robert Rash, James Isaac Fortner | 2018-10-09 |
| 10094035 | Convection optimization for mixed feature electroplating | Gabriel Hay Graham, Boon Kang Ong | 2018-10-09 |
| 10087545 | Automated cleaning of wafer plating assembly | Steven T. Mayer, Thomas A. Ponnuswamy, Robert Rash | 2018-10-02 |
| 10053793 | Integrated elastomeric lipseal and cup bottom for reducing wafer sticking | Aaron Berke, Robert Rash, Steven T. Mayer, Santosh Kumar | 2018-08-21 |
| 10014170 | Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity | Burhanuddin Kagajwala, Bryan L. Buckalew, Aaron Berke, Robert Rash, Steven T. Mayer | 2018-07-03 |
| 9988733 | Apparatus and method for modulating azimuthal uniformity in electroplating | Gabriel Hay Graham, Steven T. Mayer, Robert Rash, Aaron Berke | 2018-06-05 |