Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10094034 | Edge flow element for electroplating apparatus | Bryan L. Buckalew, Steven T. Mayer, Robert Rash, James Isaac Fortner, Lee Peng Chua | 2018-10-09 |
| 10094035 | Convection optimization for mixed feature electroplating | Lee Peng Chua, Boon Kang Ong | 2018-10-09 |
| 9988733 | Apparatus and method for modulating azimuthal uniformity in electroplating | Lee Peng Chua, Steven T. Mayer, Robert Rash, Aaron Berke | 2018-06-05 |