Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082461 | Optical metrology with purged reference chip | Andrew Klassen, Andrew H. Barada, Todd M. Petit, Chuan Sheng Tu | 2018-09-25 |
| 9977350 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Michael Sogard | 2018-05-22 |
| 9958673 | Protected lens cover plate for an optical metrology device | Jason Shields, Nir Ben Moshe | 2018-05-01 |
| 9910370 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Douglas C. Watson | 2018-03-06 |