Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958786 | Cleanup method for optics in immersion lithography using object on wafer holder in place of wafer | Hidemi Kawai | 2018-05-01 |
| 9910370 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2018-03-06 |