Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082461 | Optical metrology with purged reference chip | Andrew Klassen, Andrew J. Hazelton, Todd M. Petit, Chuan Sheng Tu | 2018-09-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082461 | Optical metrology with purged reference chip | Andrew Klassen, Andrew J. Hazelton, Todd M. Petit, Chuan Sheng Tu | 2018-09-25 |