Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, Tom Stevenson, John Daugherty +1 more | 2018-01-23 |