Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037890 | Method for selectively etching with reduced aspect ratio dependence | Adarsh Basavalingappa, Peng Wang, Bhaskar Nagabhirava, Prabhakara Gopaladasu, Randolph F. Knarr +2 more | 2018-07-31 |
| 10002773 | Method for selectively etching silicon oxide with respect to an organic mask | Bhaskar Nagabhirava, Adarsh Basavalingappa, Peng Wang, Prabhakara Gopaladasu | 2018-06-19 |
| 9972502 | Systems and methods for performing in-situ deposition of sidewall image transfer spacers | Jae Ho Lee, Changwoo Lee, Phil Friddle, Stefan Schmitz, Naveed Ansari +1 more | 2018-05-15 |